There is an ever-increasing demand for accuracy in many manufacturing industries. Adding to this general need for higher accuracy is the fact that industry sectors such as semiconductors and electronics are moving to ever-smaller feature sizes. To achieve the high levels of precision increasingly required by a variety of manufacturer, machine builders need metrology designs with encoders that can deliver accurate, reproducible measurements.
A limitation in traditional approaches is that conventional linear encoders can measure only one degree of freedom, which means they cannot detect errors in other directions. This includes the unavoidable effects of deviations from guideway error or thermal expansion, which would cause deflection along multiple axes. Simply improving an encoder’s accuracy in its primary axis is not enough to achieve the accuracy needed in many of today’s applications.
Another issue is that, in multi-axis systems, an error in one axis carries over into the other axes, thereby affecting the entire motion system. A discrepancy in any encoder axis will change the position of the machine’s tool point–but these errors are typically not measured.
To overcome this issue, Heidenhain has developed a technology that can simultaneously provide data across multiple degrees of freedom (Multi-DOF). By using multiple reader heads, and developing the encoder interface to effectively read them, errors in multiple axes can be measured and compensated for to increase overall system accuracy.
Principles of multi-axis encoders
Linear encoders consist of a scale with a grating and a scanning head. In Heidenhain’s latest encoders, for example, the scale or track has reflecting lines that are 0.2µm high and are spaced 4µm or less apart. The scanning head moves along the scale without mechanical contact and reads the grating. Although there are different methods in which an encoder can read a grating, the most precise method is to do so optically–using the refraction and interference of light to obtain exceptional accuracy.